Proforma 300i晶圆片手动测试仪

重要参数

手动非接触

测量76~300mm直径范围

网口、RS232端口配置

可选校准晶圆

软件界面设置简单


订货周期4-6周


产品详情介绍

  • Front USB port enables easy storage of measurements and other data to flash drives

  • MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability

  • Non-contact measurements

  • 76-300 mm diameter wafer range

  • Optional wafer measurement rings

  • Wafer stops for exact centering

  • Ethernet interface

  • Full remote control software (Windows compatible)

  • Optional calibration wafers


P/NModelMeasurement RangeAccuracyResolutionInterfaceTypeFrequency Response
8000-6760-001Proforma 300i1700μm (66.9mil/s)±0.25 μm0.05μmRS232 and EthernetDesktop System16.6Hz
8000-6760-002Proforma 300Gi1700μm (66.9mil/s)±0.25 μm0.05μmRS232 and EthernetDesktop System16.6Hz