MS9100.D高可靠性加速度计芯片

重要参数

高性能MEMS电容加速度计

适用于陆地、海洋、航空精密惯性系统

2-200g 动态范围

可适用于恶劣高振动环境

LCC20陶瓷封装


订货2-3周

产品详情介绍

PerformanceMS9002MS9005MS9010MS9030MS9050MS9100MS9200Units
Measurement range± 2± 5± 10± 30± 50± 100± 200g
One year bias stability @   1000g0.3 (< 1.5)0.75 (< 3.75)1.5 (< 7.5)4.5 (< 22.5)7.5 (< 37.5)15 (< 75)30 (< 150)mg typ. (max.)
Bias temp. coefficient< 0.1< 0.25< 0.5< 1.5< 2.5< 5< 10mg/°C typ.
Scale factor sensitivity (K1)1000 ± 8400 ± 4200 ± 266.6 ± 140 ± 120 ± 110 ± 1mV/g
One year scale factor   stability & [2]300 (< 1000)300 (< 1000)300 (< 1000)300 (< 1000)300 (< 1000)300 (< 1000)300 (< 1000)ppm typ. (max.)
Scale factor temp. coefficient100100100100100100100ppm / °C typ.
Resolution / Threshold (@ 1Hz)< 0.1< 0.25< 0.6< 1.7< 2.8< 5.5< 11mg max.
Non linearity< 0.8< 0.8< 0.9< 0.9< 0.9< 1< 1 [5]% of FS max.
Bandwidth0 to ≥ 1000 to ≥ 1000 to ≥ 1000 to ≥ 1000 to ≥ 1000 to ≥ 1000 to ≥ 100Hz
Noise spectral density in band1845902704509001800μg/√Hz typ.
Operating Temperature Range-55° to +125°-55° to +125°-55° to +125°-55° to +125°-55° to +125°-55° to +125°-55° to +125°°C